The role of test structures in the development and monitoring of CMOS technologies and products has become ever more important with the increased complexity and cost of development and manufacturing. Microelectronics Test Structures for CMOS Technology and Products covers the basic concepts of the design of test structures for incorporation in dedicated test-vehicles, scribe-lines and within CMOS products. Many of the ideas described in this volume are applicable to other microelectronic technologies, as well. Emphasis is placed on high speed characterization techniques for digital CMOS circuit applications and bridging between circuit performance and MOSFET characteristics. The overarching goal of this book is to provide industry practitioners and academic researchers alike a practical guide to the disciplined design and use of test structures that give unambiguous informationon the parametrics and performance of digital CMOS technology.
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